Year | 2011 |
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Authors | Li, Yiming |
Paper Title | Yiming Li, Shao-Ming Yu, and Yih-Lang Li, “Intelligent optical proximity correction using a model-based genetic algorithm,” Presented in The European Materials Research Society Fall Meeting (E-MRS 2007), Warsaw University of Technology, Poland, Sept. 17-21, 2007. |
Date of Publication | 2011-08-01 |