Year | 2009 |
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Authors | Li, Yiming |
Paper Title | Yiming Li and Shao-Ming Yu, "A Coupled-Simulation-and-Optimization Approach to Nanodevice Fabrication with Minimization of Electrical Characteristics Fluctuation" , IEEE Transactions on Semiconductor Manufacturing, Vol. 20, No. 4, Nov. 2007, pp. 432-438 (SCI期刊), 2007年11月 |
Date of Publication | 2009-03-31 |